Title Catalyst-free synthesis of few-layer graphene films on silicon dioxide/Si substrates using ethylene glycol by chemical vapor deposition
Authors 黄新堂
Issue Date 2019
Publisher Materials Research Express(2020年影响因子:1.620)
Keywords BILAYER GRAPHENE
HIGH-QUALITY
GROWTH
RAMAN-SPECTROSCOPY
MONOLAYER
TRANSPARENT
ROADMAP
CONFINEMENT
Abstract Catalyst-free growth of graphene directly on dielectric substrates is a challenging work for graphene-based electronics. In this paper, a simple method to synthesize large area few layer graphene films on silicon dioxide/Si substrates by chemical vapor deposition is reported. A novel liquid carbon source (ethylene glycol) is used, without any catalysts. The obtained graphene films are characterized by Raman spectroscopy, X-ray photoelectron spectroscopy, atomic force microscopy. The field effect transistor with graphene film as channel material is fabricated, and the carrier mobility is 707 cm 2 V -1 .S -1 . This work offers a new strategy to directly grow graphene on silicon dioxide/Si substrates, and the as-synthesized graphene films may have potential applications in sensors, conductive films, electronic devices, etc
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